Built For Semiconductor Production

How Can ZEISS's Failure Analysis Correlative Workflow Help You?

Helping You Succeed In Semiconductor Failure Analysis

ZEISS X-Ray Microscopes (XRM) and Scanning Electron Microscopes (SEM) are advanced imaging tools that play a crucial role in semiconductor failure analysis. These instruments enable high-resolution imaging and analysis of the internal structures and materials of a sample.

The XRM provides elemental and compositional analysis by generating high-resolution images of a sample using X-rays, while the SEM generates high-resolution images by scanning a sample with an electron beam. The combination of these two imaging techniques provides a comprehensive view of a sample, which is essential for identifying the root cause of a failure in semiconductors.

  • Perform non-destructive imaging with ZEISS XRM
  • Perform site specific physical analysis
  • Perform broad ion beam / mechanical polishing

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ZEISS's Correlative Failure Analysis Workflow

Learn How ZEISS Can Help You With Your Semiconductor Production


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  • Non-Destructive Imaging

    Using ZEISS XRM

    Need to perform non-destructive imaging? XRMs allow for non-destructive imaging of delicate electronic components, providing crucial insights into the root cause of failures without damaging the sample. This technology is essential for improving the reliability and efficiency of semiconductors, making it an invaluable tool for the industry.


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  • Site Specific Physical Analysis

    Using ZEISS FIB SEM Crossbeam

    Focused Ion Beam Scanning Electron Microscopes (FIB-SEMs) are a combination of two powerful microscopic techniques and are widely used in the semiconductor failure analysis process. These microscopes use a focused beam of ions to cut thin slices of a sample, which are then imaged using a scanning electron microscope.

    The ion beam also allows site-specific physical analysis of the sample, including milling, doping, and compositional analysis. This ability to analyze specific regions of the sample makes FIB-SEMs essential tools for identifying the root cause of semiconductor failures and for optimizing device performance.

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  • BIB / Mechanical Polishing

    Using ZEISS Broad Ion Beam SEM

    Broad Ion Beam Scanning Electron Microscopes (BIB-SEMs) are widely used in the semiconductor failure analysis process for mechanical polishing. These microscopes use a broad ion beam to remove material from the surface of a sample in a controlled manner, which allows for preparation of the sample surface for imaging with a scanning electron microscope. The broad ion beam provides a homogeneous material removal, resulting in a polished and uniform surface that is suitable for high-resolution imaging and analysis.

    BIB-SEMs are particularly useful in the semiconductor failure analysis process as they allow for the removal of surface damage, which can obscure the underlying cause of a failure. By mechanically polishing the surface of a sample, BIB-SEMs enable detailed imaging and analysis of the underlying materials and structures, facilitating the identification of the root cause of a failure.

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