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Webinar

Nanoprobing: 10 Signals for device characterization & defect localization

In this session, we shift the focus to nanoprobing, introducing techniques such as current-voltage characterization, electron beam absorbed current (EBAC), electron beam induced current (EBIC), and electron beam induced resistance change (EBIRCH). Logic and power device applications will be presented, along with a case study on eDRAM shorts that illustrates nanoprobing's ability to uncover subtle defects, particularly in complex systems.

Register for the free webinar here
Register for the free webinar here
Register for the free webinar

About the webinar

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Speaker Greg Johnson Senior Application Development Engineer

Greg Johnson is a Senior Application Development Engineer in the Electronics Sector of ZEISS Microscopy and a senior IEEE member. With over 20 years of experience in semiconductor process development and failure analysis, Greg brings a wealth of experience to his role. Previously at IBM, he contributed to ceramic packaging process development and led FEOL defect localization efforts across multiple technology nodes, developing advanced failure analysis techniques. At ZEISS, Greg works with failure analysis engineers worldwide to advance SEM, FIB-SEM, and AFM techniques for semiconductor process development.

Speaker Dr. Sven Davani Market Sector Manager

Dr. Sven Davani is the Market Sector Manager for Electronics at ZEISS, specializing in SEM and FIB-SEM technologies to tackle challenges in advanced semiconductor logic, memory, and packaging. He brings a customer-focused approach to driving technology adoption in the electronics industry. Before ZEISS, Sven worked in R&D consulting on innovation strategies and led product management in a startup, gaining experience in bringing new technologies to market. Sven holds a PhD in Physics from the University of Münster, with research in material science and microscopy published in journals like Acta Materialia and Ultramicroscopy.

With this webinar, you learn:

  • The importance of localization for semiconductor failure analysis.
  • The essential equipment, including SEM and nanoprobing systems, required for performing key electrical measurements like resistance and threshold voltage.
  • The physics and uses cases for 10 different localization signals from nanoprobe-based analyses.
  • The challenges in finding shorts in complex systems.
  • Nanoprobing’s ability to measure device health and localize a wide range of defects.

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