Nanoprobing on current and future technology nodes pose challenges due to the devices' electron beam sensitivity. However, the ProbeWorkstation and its centrepiece, the PS8e Prober Shuttle, provide operators with the required tools and workflows to address these devices with ease - even at very low acceleration voltages. This will be demonstrated live by performing transistor characterization and EBIC experiments.
Andreas Rummel studied physics at the Eberhard-Karls-Universität in Tübingen, focusing on electron and force microscopy. In addition, he is working on applied research and development in electrical probing, sample preparation and manipulation at Kleindiek Nanotechnik.
Dr Andrew Jonathan Smith studied chemistry at the Heinrich-Heine-Universität Düsseldorf. After specializing in electrochemistry, he moved into the field of nanotechnology, studying arrays of metallic nanowires. In July 2008, he joined Kleindiek Nanotechnik and is responsible for sales support and application development.