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Introducing ZEISS LaserSEM: Your future to micro & mesoscale sample preparation

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Welcome to the future of micro- and mesoscale sample preparation. The ZEISS LaserSEM integrates the ultrafast and athermal femtosecond laser with high-resolution SEM. It aims to provide a fast and cost-effective solution for large array site-specific sample preparation without contaminating the main electron chamber.

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Array of 16 pillars for micro-mechanical testing samples prepared with the fs-laser in Ti6Al4V alloy, pillar diameter at the top 30 µm, 55 µm at the bottom: 2.5 min preparation time.
Array of 16 pillars for micro-mechanical testing samples prepared with the fs-laser in Ti6Al4V alloy, pillar diameter at the top 30 µm, 55 µm at the bottom: 2.5 min preparation time.

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  1. The key feature of ZEISS LaserSEM enables rapid and massive material removal as well as site-specific sample preparation.
  2. How to ensure electron column cleanliness while preparing site-specific large array samples
  3. How to efficiently perform targeted site-specific and subsurface sample analysis such as EDS, EBSD, or 3D Tomography
  4. How to prepare massive sample and analysis in a controlled air-free environment
  5. How to enhance your research efficiency by streamlining correlative microscopy workflows for multiscale and multimodal data presentation

Navigating Microscope hurdles in large array sample preparation

✔️ Do you struggle to prepare a large array of Electron Microscopy samples efficiently and effectively for subsequent imaging or microanalysis?
✔️ Do you hope to have a site-specific large array sample preparation tool that does not contaminate the main electron column?
✔️ Do you struggle to perform large array sample preparation at targeted regions of interest?
✔️ Do you find it challenging to prepare a large array of samples in an air-free environment?
✔️ Do you aim to expedite your correlative microscopy workflow for subsurface feature analysis for multiscale and multimodal data presentation?

  • Array of 80 cantilevers for micro-beam bending experiments, laser cut in W foil in less than 30 mins

    Array of 80 cantilevers for micro-beam bending experiments, laser cut in W foil in less than 30 mins

1. Ideal for rapid, site-specific large array sample preparation

Perform site-specific large array sample preparation with an integrated femtosecond laser at removal rates up to 15 million µm³.

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  • Cross-jet Protective Glass, with cross-jet off (top) and cross-jet on (bottom)

  • Three trenches laser-milled in copper, with cross-jet off (top) and cross-jet on (bottom)

2. Maintain cleanliness of electron column while preparing large arrays of samples

The femtosecond laser is integrated outside of the imaging FE-SEM chamber to maintain the cleanliness of the electron column while ensuring high-quality SEM imaging.

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  • Alloy 600 sheet, polished cross-section in 3 laser step. Rough mill, fine polishing I and fine polishing II: 18 min preparation time

    Alloy 600 sheet, polished cross-section in 3 laser step. Rough mill, fine polishing I and fine polishing II: 18 min preparation time

  • EBSD map quality after post-processing with Neighbor Orientation Correlation (NOC) filter and Grain Dilation filter

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    3D Tomography video at targeted site-specific region-of-interest

3. Targeted site-specific high-resolution imaging and analysis at subsurface regions of interest

Perform subsurface imaging and analytics at your desired region of interest; this includes EDS, EBSD, or 3D Tomography.

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  • ZEISS Correlative Microscopy Ecosystem for Multiscale & Multimodal Sample Preparation and Analysis

    ZEISS Correlative Microscopy Ecosystem for Multiscale & Multimodal Sample Preparation and Analysis

  • Infographics for subsurface sample preparation and analysis

4. Accelerate correlative Microscopy workflow for multiscale & multimodal data presentation

Connect various microscopy imaging techniques with ZEISS's comprehensive microscopy ecosystem to conduct subsurface sample preparation and analysis. This ultimately enables the presentation of multiscale and multimodal data.

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Why Choose ZEISS LaserSEM?

Rapid massive material removal

The ZEISS LaserSEM’s integrated femtosecond laser is capable of removing materials 10,000 times faster than the plasma technology, significantly increasing your microscopy workflow efficiency

Contamination-free environment

The integrated laser chamber outside of the FE-SEM ensures that the main electron column remains uncontaminated, maintaining imaging & analysis quality

Advanced site-specific subsurface analysis

Perform targeted site-specific subsurface sample preparation and analysis with techniques such as EDS, EBSD and 3D tomography enabling detailed insights into your samples

Comprehensive correlative Microscopy

Benefit from a seamless and rapid correlative microscopy workflow, allowing for multiscale and multimodal data presentation

Future-ready

With possible future upgrades, the ZEISS LaserSEM ensures that your investment remains valuable and up-to-date with advancing technologies

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