Combine in situ AFM and SEM for Nanomaterials Analysis
The best of both worlds in one – down to atomic level
- Add 3D topographical information at the atomic level to your SEM
- Position the AFM tip on any surface under SEM control
- Conduct in situ high-resolution measurements of mechanical, electrical, chemical, thermal and magnetic properties
Discover the AFM-SEM technology from ZEISS
Superb image quality meets high resolution AFM
Laser Deflection AFM
The integrated AFM is a high resolution, sample scanning system that scans a volume of 25 μm × 25 μm × 5 μm and a maximum sample size of 10 mm. The design allows a minimum working distance of 5 mm, which delivers excellent SEM performance

Gemini Optical Column
ZEISS FE-SEMs and FIB-SEMs are based on Gemini electron optics. The design lets you maximize the optical performance while enabling excellent imaging on any sample, allowing high resolution imaging and high signal-to-noise ratios for best image quality.

ZEISS Integrated AFM
Read the product brochure
Need all the information about the only true in situ AFM Solution from ZEISS? Download the Product Brochure below and go into the details. Learn about advantages of the ZEISS AFM-SEM solution, applications and the technical specifications.
Achieve your moments of discovery
Download the white papers
See what’s possible in nanomaterials research. Download the white papers and learn how to use the power of AFM-SEM to anlayze helium ion beam exposed nanostructures. Enable scanning thermal microscopy of surfaces with lateral resolutions better than 50 nm.

White Paper Package
Register and download two white papers
Questions? Get in Touch with Us
Let’s talk about your research
Get in touch with us to find out more about the benefits of ZEISS Microscopy Solutions for your research, book a demo at our customer center, or get a quote. We are looking forward to hearing from you.